Entegris

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10 Forge Pkwy Ste 3
Franklin, MA 02038
+1 (508) 553-8300
http://entegris.com
Entegris is a leader in lithography molecular contamination measurement and control. The company s products and services include exposure tools, track tools, real-time monitors, low-level air sampling, periodic sampling, custom design services and extraction airelab services. Its filtration, instrumentation and analytical services are used throughout the industry to protect advanced lithography processes and equipment. The company maintains advanced lithography programs with International SEMATECH and IMEC and is partially owned by the Massachusetts Institute of Technology. The company was established in 1984 and has headquarters in Franklin, Mass. Entegris also has offices in Scottsdale, Ariz., and Canby, Ore., as well as offices throughout Europe and Asia.

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