Advanced Metrology Systems LLC

Permanently closed
47 Manning Rd
Billerica, MA 01821
Semilab AMS manufactures high-throughput, noncontact measurement tools for online monitoring during semiconductors manufacturing. It also provides a variety of advanced metrology equipment. The company offers comprehensive, scalable metrology solutions for various stages of semiconductor processes. Its proprietary SurfaceWave technology measures the thickness and uniformity of thin film metals and dielectrics. The company s unique model-based infrared reflectometry technology measures the thickness, depth and parameters of etched and recess filled trench structures with nanometer precision. In addition, it provides online information request services.
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United StatesMassachusettsBillericaAdvanced Metrology Systems LLC

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